Measurement Range
0 ... 10,20,50,100,200,500 (sccm)
0 ... 1,2,5,10,20,50 (slm)
Other Range up to 50 (slm) (By Order)
0 ... 1,2,5,10,20,50 (slm)
Other Range up to 50 (slm) (By Order)
Accuracy
< ± 1.5% (FS)
< ± 1% (FS) (By Order)
< ± 1% (FS) (By Order)
Response Time
1.5 ... 2.5 (s)
1 ... 1.5 (s) (By Order)
1 ... 1.5 (s) (By Order)
Turndown
1:50
<1:200 (By Order)
<1:200 (By Order)
Operating Gas
Air, N2, H2, Ar, O2
Other Gases By Order
Operating Pressure
Max Inlet Pressure :
40 (bar)
<100 (bar) (By Order)
Min ∆P:
0.1 to 0.5 (bar)
<0.1 (bar) (By Order)
40 (bar)
<100 (bar) (By Order)
Min ∆P:
0.1 to 0.5 (bar)
<0.1 (bar) (By Order)
Operating Temperature
-5 ... +70 (℃)
Warm-up Time
5 (min) for Acc. < ±2.0 (FS)
45 (min) for Acc. < ±1.5 (FS)
45 (min) for Acc. < ±1.5 (FS)
Wet Parts
SS 304
SS 316 & CRC* (By Order)
SS 316 & CRC* (By Order)
Mechanical Fitting
BSP: 1/4``
Other (By Order)
Other (By Order)
Seals
NBR
Viton, EPDM, FVMQ (By Order)
Viton, EPDM, FVMQ (By Order)
Weight
~500 (gr)
Dimensions
70x32x133 (mm)
* CRC: Corrosion Resistant Coating Part
Power Supply
20 ... 25 (Volt)
Power Consumption
< 2.8 (Watt)
Signal In & Out
0 ... 5 (Volt)
4 ... 20 (mA) (By Order)
Modbus (By Order)
(RS485_Auto Baud Rate)
(RTU_ASCII)
4 ... 20 (mA) (By Order)
Modbus (By Order)
(RS485_Auto Baud Rate)
(RTU_ASCII)
Electrical Connection
1 x 9 - pin Male Sub-D (DB9)
EX Connecter (By Order)
EX Connecter (By Order)
Resolution
500
1000 (By Order)
1000 (By Order)