Measurement Range
0 ... 10,20,50,100,200,500 (sccm)
0 ... 1,2,5,10,20,50 (slm)
Other ranges up to 50slm By Order
Accuracy
<±1.5% (FS)
<±1% (FS) By Order
Response Time
1.5 ... 2.5 (second)
1 ... 1.5 (second) By Order
Turndown
1:50
1:100 (By Order)
1:100 (By Order)
Operating Gas
Air, N2, H2, Ar, O2
Other Gases By Order
Operating Pressure
Max Inlet Pressure :
<10 (bar)
<20 (bar) (By Order)
Max ∆P:
6 (bar)
10 (bar) (By Order)
Min ∆P:
1 (bar)
<1 (bar) (By Order)
<10 (bar)
<20 (bar) (By Order)
Max ∆P:
6 (bar)
10 (bar) (By Order)
Min ∆P:
1 (bar)
<1 (bar) (By Order)
Operating Temperature
-5 ... +40 (°C) By Order
Warm-up Time
5 (min) for Acc. < ±2.0 (FS)
45 (min) for Acc. < ±1.5 (FS)
45 (min) for Acc. < ±1.5 (FS)
Wet Parts
SS 304 & SS 420 & Al
SS 316 & CRC* (By Order)
SS 316 & CRC* (By Order)
Mechanical Fitting
BSP: 1/4``
Other (By Order)
Other (By Order)
Seals
NBR
Viton, EPDM, FVMQ (By Order)
Viton, EPDM, FVMQ (By Order)
Dimensions
98x40x133 (mm)
Weight
~800 (gr)
* CRC: Corrosion Resistant Coating Part
Power Supply
20 ... 25 (Volt)
Power Consumption
< 7.2 (Watt)
Signal In & Out
0 ... 5 (Volt)
4 ... 20 (mA) (By Order)
Modbus (By Order)
(RS485_Auto Baud Rate)
(RTU_ASCII)
4 ... 20 (mA) (By Order)
Modbus (By Order)
(RS485_Auto Baud Rate)
(RTU_ASCII)
Electrical Connection
1 x 9 - pin Male Sub-D (DB9)
EX Connecter (By Order)
EX Connecter (By Order)
Resolution
500
1000 (By Order)
1000 (By Order)